Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11167326 | Substrate processing apparatus and nozzle unit | Min Sung Han, Jinkyu Kim, Yoon Jong Ju | 2021-11-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11167326 | Substrate processing apparatus and nozzle unit | Min Sung Han, Jinkyu Kim, Yoon Jong Ju | 2021-11-09 |