Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004675 | Substrate cleaning composition, substrate treating method, and substrate treating apparatus | Hae-Won Choi, Ki-Moon Kang, Kihoon Choi, Anton Koriakin, Chan Young Heo +3 more | 2021-05-11 |
| 10915026 | Substrate treating apparatus and substrate treating method | Hae-Won Choi, Kihoon Choi, Ki-Moon Kang, Chan Young Heo, Anton Koriakin | 2021-02-09 |
| 10908503 | Apparatus for treating substrate | Kihoon Choi, Chan Young Heo, Do Heon Kim, Hae-Won Choi, Anton Koriakin +1 more | 2021-02-02 |