Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004675 | Substrate cleaning composition, substrate treating method, and substrate treating apparatus | Ki-Moon Kang, Kihoon Choi, Anton Koriakin, Chan Young Heo, Jaeseong Lee +3 more | 2021-05-11 |
| 10915026 | Substrate treating apparatus and substrate treating method | Kihoon Choi, Ki-Moon Kang, Chan Young Heo, Anton Koriakin, Jaeseong Lee | 2021-02-09 |
| 10908503 | Apparatus for treating substrate | Kihoon Choi, Chan Young Heo, Do Heon Kim, Jaeseong Lee, Anton Koriakin +1 more | 2021-02-02 |