Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149346 | Method of directly growing carbon material on substrate | Changhyun KIM, Hyeonjin Shin, Kyung-Eun BYUN, Keunwook Shin, Changseok LEE +4 more | 2021-10-19 |
| 11086223 | Hardmask composition and method of forming pattern using the hardmask composition | Hyeonjin Shin, Sangwon Kim, Minsu SEOL, Seongjun Park | 2021-08-10 |
| 11088077 | Layer structure including diffusion barrier layer and method of manufacturing the same | Hyunjae Song, Seunggeol NAM, Seongjun Park, Hyeonjin Shin, Jaeho Lee | 2021-08-10 |
| 11069619 | Interconnect structure and electronic device employing the same | Seunggeol NAM, Hyeonjin Shin, Keunwook Shin, Changhyun KIM, Kyung-Eun BYUN +4 more | 2021-07-20 |
| 10971451 | Interconnect structure having nanocrystalline graphene cap layer and electronic device including the interconnect structure | Kyung-Eun BYUN, Keunwook Shin, Yonghoon Kim, Hyeonjin Shin, Hyunjae Song +2 more | 2021-04-06 |