Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923326 | Gas spraying apparatus for substrate processing apparatus and substrate processing apparatus | Cheong SON | 2021-02-16 |
| 10894935 | Composition for removing silicone resins and method of thinning substrate by using the same | In-goo Kang, Baik-Soon Choi, Sue KIM, Young-Taek Hong, Sang Tae Kim +3 more | 2021-01-19 |