Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923326 | Gas spraying apparatus for substrate processing apparatus and substrate processing apparatus | Sung-Bae Kim | 2021-02-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923326 | Gas spraying apparatus for substrate processing apparatus and substrate processing apparatus | Sung-Bae Kim | 2021-02-16 |