Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11034847 | Hardmask composition, method of forming pattern using hardmask composition, and hardmask formed from hardmask composition | Minsu SEOL, Sangwon Kim, Hyeonjin Shin, Dongwook LEE, Seongjun Park +2 more | 2021-06-15 |
| 10996556 | Pellicles for photomasks, reticles including the photomasks, and methods of manufacturing the pellicles | Minhyun LEE, Hyeonjin Shin, Seongjun Park | 2021-05-04 |
| 10928723 | Pellicle for photomask, reticle including the same, and exposure apparatus for lithography | Hyeonjin Shin, Hyunjae Song, Seongjun Park, Keunwook Shin, Changseok LEE +3 more | 2021-02-23 |