Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916437 | Methods of forming micropatterns and substrate processing apparatus | Jong-Min Baek, Hoon Seok Seo, Eui Bok Lee, Sung-Jin Kang, VietHa Nguyen +4 more | 2021-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916437 | Methods of forming micropatterns and substrate processing apparatus | Jong-Min Baek, Hoon Seok Seo, Eui Bok Lee, Sung-Jin Kang, VietHa Nguyen +4 more | 2021-02-09 |