Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916437 | Methods of forming micropatterns and substrate processing apparatus | Sang Shin Jang, Jong-Min Baek, Hoon Seok Seo, Sung-Jin Kang, VietHa Nguyen +4 more | 2021-02-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10916437 | Methods of forming micropatterns and substrate processing apparatus | Sang Shin Jang, Jong-Min Baek, Hoon Seok Seo, Sung-Jin Kang, VietHa Nguyen +4 more | 2021-02-09 |