Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971335 | Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same | Hyungjoon Kim, HEE JONG JEONG | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971335 | Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same | Hyungjoon Kim, HEE JONG JEONG | 2021-04-06 |