Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971335 | Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same | Hyungjoon Kim, Myoungwoon Kim | 2021-04-06 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971335 | Radio frequency (RF) power monitoring device and plasma enhanced (PE) system including the same | Hyungjoon Kim, Myoungwoon Kim | 2021-04-06 |