Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10995268 | Etching composition effective to selectively wet etch a silicon nitride film | Sok Ho Lee, Seong-Sik Jeon, Sung Il Jo, Byeoung Tak Kim, Ah Hyeon Lim +1 more | 2021-05-04 |
| 10890772 | Guided mode resonance device for optical beam tapping and imaging without rainbows | Mark L. Brongersma | 2021-01-12 |