Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10995268 | Etching composition effective to selectively wet etch a silicon nitride film | Sok Ho Lee, Jung Hwan Song, Sung Il Jo, Byeoung Tak Kim, Ah Hyeon Lim +1 more | 2021-05-04 |