Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137693 | Pellicle holder, pellicle inspection apparatus, and pellicle inspection method | Young Woong Kim, Dong Gon Woo | 2021-10-05 |
| 10962876 | EUV pellicle structure and method for manufacturing same | Jung-Hwan Kim, Jung Sik Kim, Dong Gon Woo, Yong Ju JANG | 2021-03-30 |