Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962876 | EUV pellicle structure and method for manufacturing same | Jin Ho Ahn, Jung-Hwan Kim, Jung Sik Kim, Dong Gon Woo | 2021-03-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962876 | EUV pellicle structure and method for manufacturing same | Jin Ho Ahn, Jung-Hwan Kim, Jung Sik Kim, Dong Gon Woo | 2021-03-30 |