Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183402 | Laser annealing apparatus for semiconductors having multiple laser energy measuring means | Joong-han Shin, Supakit Charnvanichborikarn, Bong-Jin Kuh, Ki-Chul Kim | 2021-11-23 |
| 11158510 | Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer | Nam Hoon Lee, Ill Hyun Park, Tae Hee Han, Jin Won Ma, Byung Joo Oh +4 more | 2021-10-26 |
| 11004087 | Systems and methods for processing exception event request to identify defective product | Binna Kim, Myeong Woo Yang | 2021-05-11 |