Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158510 | Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer | Nam Hoon Lee, Ill Hyun Park, Tae Hee Han, Byung Joo Oh, Bong Ju Lee +4 more | 2021-10-26 |