Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937629 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hironori Teguri, Yasuo Kato, Masafumi Ise | 2021-03-02 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937629 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Hironori Teguri, Yasuo Kato, Masafumi Ise | 2021-03-02 |