Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937629 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Jun Yashima, Yasuo Kato, Masafumi Ise | 2021-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937629 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Jun Yashima, Yasuo Kato, Masafumi Ise | 2021-03-02 |