Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11150190 | Hybrid metrology method and system | Yanir Hainick, Yonatan Oren | 2021-10-19 |
| 11143601 | Test structure design for metrology measurements in patterned samples | Oded Cohen, Igor Turovets | 2021-10-12 |
| 11099142 | X-ray based measurements in patterned structure | — | 2021-08-24 |
| 11029258 | Optical phase measurement method and system | Danny Grossman, Dror Shafir, Yoav Berlatzky, Yanir Hainick | 2021-06-08 |