Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11193882 | Ellipsometer and inspection device for semiconductor device | — | 2021-12-07 |
| 11037283 | Inspecting apparatus based on hyperspectral imaging | Sung Ho JANG, Young Kyu Park, Ye Eun PARK, Yu-Sin Yang | 2021-06-15 |