Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892176 | Substrate processing apparatus having top plate with through hole and substrate processing method | Yoshinori Ikeda, Shota Umezaki | 2021-01-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892176 | Substrate processing apparatus having top plate with through hole and substrate processing method | Yoshinori Ikeda, Shota Umezaki | 2021-01-12 |