Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11204081 | Screw shaft, feed screw mechanism, and electric actuator | Tatsunori Shimizu, Shinsuke Hirano | 2021-12-21 |
| 11177718 | Electric actuator with screw shaft | Takushi Matsuto, Yuuki NAITOU | 2021-11-16 |
| 11162565 | Electric actuator | Takushi Matsuto, Shinsuke Hirano, Atsushi Ikeda, Tomomi Ishikawa | 2021-11-02 |
| 11149829 | Electric actuator | Takushi Matsuto, Shinsuke Hirano, Atsushi Ikeda, Tomomi Ishikawa, Tatsuji Inoue | 2021-10-19 |
| 11101716 | Electric actuator | Takushi Matsuto, Yuuki NAITOU | 2021-08-24 |
| 10892176 | Substrate processing apparatus having top plate with through hole and substrate processing method | Shota Umezaki, Kenji Nishi | 2021-01-12 |