Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114287 | Radical output monitor for a remote plasma source and method of use | Chiu-Ying Tai, Atul Gupta | 2021-09-07 |
| 10994269 | Method and apparatus for coating a carrier | Dieter Detterbeck, Egbert Lox, Thomas Kreuzer | 2021-05-04 |