Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114287 | Radical output monitor for a remote plasma source and method of use | Michael Harris, Atul Gupta | 2021-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114287 | Radical output monitor for a remote plasma source and method of use | Michael Harris, Atul Gupta | 2021-09-07 |