Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011521 | Semiconductor structure patterning | Sevim Korkmaz, Devesh Dadhich Shreeram, Srinivasan Balakrishnan, Dewali Ray, Sanjeev Sapra | 2021-05-18 |
| 10985239 | Oxidative trim | Matthew N. Rocklein, An-Jen B. Cheng, Fredrick Fishburn, Sevim Korkmaz | 2021-04-20 |
| 10964536 | Formation of an atomic layer of germanium in an opening of a substrate material having a high aspect ratio | Francois H. Fabreguette, Gurtej S. Sandhu, John Smythe, Matthew N. Rocklein | 2021-03-30 |