Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029594 | Optimization of a lithography apparatus or patterning process based on selected aberration | Steven George Hansen, Kateryna Stanislavovna Lyakhova | 2021-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11029594 | Optimization of a lithography apparatus or patterning process based on selected aberration | Steven George Hansen, Kateryna Stanislavovna Lyakhova | 2021-06-08 |