Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937634 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Jack Chen, Adam Liron | 2021-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937634 | Tunable upper plasma-exclusion-zone ring for a bevel etcher | Jack Chen, Adam Liron | 2021-03-02 |