Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205573 | Ge-containing Co-film forming material, Ge-containing Co film and film forming method thereof | Rocio Alejandra Arteaga Muller, Jean-Marc Girard, Changhee Ko, Antonio Sanchez, Raphael ROCHAT | 2021-12-21 |
| 11168099 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2021-11-09 |
| 11066310 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2021-07-20 |
| 11021793 | Group 6 transition metal-containing compositions for vapor deposition of group 6 transition metal-containing films | Rocio ARTEAGA, Raphael ROCHAT, Antonio Sanchez, Jean-Marc Girard, Santiago Marques-Gonzalez +3 more | 2021-06-01 |
| 10899630 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2021-01-26 |