Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11168099 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Nicolas Blasco | 2021-11-09 |
| 11124876 | Si-containing film forming precursors and methods of using the same | Jean-Marc Girard, Peng Zhang, Antonio Sanchez, Manish Khandelwal, Gennadiy Itov +2 more | 2021-09-21 |
| 11097953 | Process for producing liquid polysilanes and isomer enriched higher silanes | Guillaume Husson, Gennadiy Itov, Yang Wang | 2021-08-24 |