Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047806 | Defect discovery and recipe optimization for inspection of three-dimensional semiconductor structures | Santosh Bhattacharyya, Devashish Sharma, Christopher Maher, Bo Hua, Robert M. Danen | 2021-06-29 |
| 10928740 | Three-dimensional calibration structures and methods for measuring buried defects on a three-dimensional semiconductor wafer | Robert M. Danen | 2021-02-23 |
| 10887580 | Three-dimensional imaging for semiconductor wafer inspection | Pavel Kolchin, Robert M. Danen | 2021-01-05 |