Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156927 | System and method for switching between an EUV pellicle and an optical pellicle | Daniel Andrew Smith | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156927 | System and method for switching between an EUV pellicle and an optical pellicle | Daniel Andrew Smith | 2021-10-26 |