Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156927 | System and method for switching between an EUV pellicle and an optical pellicle | Mohammad Mehdi Daneshpanah | 2021-10-26 |
| 11086213 | Mask assembly and associated methods | Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga +3 more | 2021-08-10 |
| 11029595 | Mask assembly and associated methods | Derk Servatius Gertruda Brouns, Dennis De Graaf, Robertus Cornelis Martinus De Kruif, Paul Janssen, Matthias Kruizinga +3 more | 2021-06-08 |