Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11185895 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Hideaki Sakurai, Kosuke TAKAI, Kyo Otsubo, Minako Inukai | 2021-11-30 |
| 11123774 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Kosuke TAKAI, Hideaki Sakurai | 2021-09-21 |
| 11061324 | Manufacturing method of replica template, manufacturing method of semiconductor device, and master template | Shingo Kanamitsu | 2021-07-13 |