Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11185895 | Substrate processing method, substrate processing apparatus, and composite processing apparatus | Mana TANABE, Hideaki Sakurai, Kosuke TAKAI, Kyo Otsubo | 2021-11-30 |
| 10882082 | Freeze cleaning apparatus | Hideaki Sakurai, Kyo Otsubo | 2021-01-05 |