Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189489 | Substrate treatment apparatus and manufacturing method of semiconductor device | Masayuki Kitamura, Takayuki BEPPU | 2021-11-30 |
TA
Tomotaka ARIGA
Overall (2021): #230,412 of 548,734Top 45%
1
Patents 2021