Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189489 | Substrate treatment apparatus and manufacturing method of semiconductor device | Takayuki BEPPU, Tomotaka ARIGA | 2021-11-30 |
| 11177135 | Mask member and method for producing semiconductor device | Yuya Matsubara, Atsuko Sakata | 2021-11-16 |
| 11139173 | Production method of semiconductor device | Katsuaki Natori, Satoshi Wakatsuki | 2021-10-05 |
| 11139246 | Semiconductor device with aligned vias | Atsushi Kato | 2021-10-05 |
| 11011369 | Carbon film forming method, carbon film forming apparatus, and storage medium | Akira Shimizu, Yosuke Watanabe | 2021-05-18 |
| 11004804 | Semiconductor device and method of manufacturing the same | Satoshi Wakatsuki, Atsuko Sakata | 2021-05-11 |