Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004683 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Kazuya Fukuhara, Masayuki Hatano | 2021-05-11 |
TN
Tetsuro Nakasugi
Overall (2021): #237,635 of 548,734Top 45%
1
Patents 2021