Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004683 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Tetsuro Nakasugi, Masayuki Hatano | 2021-05-11 |
KF
Kazuya Fukuhara
Overall (2021): #383,971 of 548,734Top 70%
1
Patents 2021