Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192239 | Substrate processing apparatus | Robert T. Caveney | 2021-12-07 |
| 10978330 | On the fly automatic wafer centering method and apparatus | Bing Yin, Jairo T. Moura, Aaron Gawlik, Nathan Spiker | 2021-04-13 |