Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11192239 | Substrate processing apparatus | Vincent W. Tsang | 2021-12-07 |
| 11195738 | Substrate processing apparatus | Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew, Jairo T. Moura | 2021-12-07 |
| 11121015 | Substrate transport | Daniel Babbs, Robert C. May, Krzysztof A Majczak | 2021-09-14 |
| 11110598 | Compact direct drive spindle | — | 2021-09-07 |