Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11209737 | Performance optimized scanning sequence for eBeam metrology and inspection | Henning Stoschus, Stefan Eyring, Inna Steely-Tarshish, Nadav Gutman | 2021-12-28 | $257,755,000 |