Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152389 | Methods for solving epitaxial growth loading effect at different pattern density regions | Haihui Huang, Er Jiang Xu, Meng Wang | 2021-10-19 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152389 | Methods for solving epitaxial growth loading effect at different pattern density regions | Haihui Huang, Er Jiang Xu, Meng Wang | 2021-10-19 |