Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152389 | Methods for solving epitaxial growth loading effect at different pattern density regions | Zhen Fang, Er Jiang Xu, Meng Wang | 2021-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152389 | Methods for solving epitaxial growth loading effect at different pattern density regions | Zhen Fang, Er Jiang Xu, Meng Wang | 2021-10-19 |