Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158079 | Substrate treating apparatus and apparatus and method for eccentricity inspection | Ohyeol Kwon, Soo Young Park, Jihyun Lee | 2021-10-26 |
| 10991603 | Apparatus and method for treating substrate | Oh Jin Kwon, Chong-Min Ryu | 2021-04-27 |