Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158079 | Substrate treating apparatus and apparatus and method for eccentricity inspection | Soo Young Park, Jihyun Lee, Young Ho Choo | 2021-10-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158079 | Substrate treating apparatus and apparatus and method for eccentricity inspection | Soo Young Park, Jihyun Lee, Young Ho Choo | 2021-10-26 |