Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081338 | Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device | Younsoo Kim, Haeryong KIM, Seungmin Ryu, Sunmin MOON, Jeonggyu SONG +2 more | 2021-08-03 |
| 11081389 | Method of manufacturing semiconductor device | Seung-min Ryu, Younsoo Kim, Gyu-hee Park, Jaesoon Lim | 2021-08-03 |
| 10883173 | Gas storage cylinder, deposition system, and method of manufacturing semiconductor device | Yeonock Han, Wonwoong Chung, Keum Seok Park, Pankwi Park, Jeongho Yoo +4 more | 2021-01-05 |