Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081338 | Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device | Younsoo Kim, Haeryong KIM, Seungmin Ryu, Sunmin MOON, Changsu Woo +2 more | 2021-08-03 |