Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211282 | Apparatus to reduce contamination in a plasma etching chamber | Andrew Nguyen | 2021-12-28 |
| 11199267 | Symmetric flow valve for higher flow conductance | Andrew Nguyen, Yogananda Sarode Vishwanath, Anilkumar Rayaroth, Chetan Naik, Balachandra Jatak Narayan | 2021-12-14 |
| 11069547 | In-situ temperature measurement for inside of process chamber | Andrew Nguyen | 2021-07-20 |