Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021796 | Gas injectors and wafer processing apparatuses having the same | Jong Hyun Lee, Young Kwon Kim, Seung-min Ryu, Ji Ho Uh | 2021-06-01 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11021796 | Gas injectors and wafer processing apparatuses having the same | Jong Hyun Lee, Young Kwon Kim, Seung-min Ryu, Ji Ho Uh | 2021-06-01 |